作者
Shudong Wang, Xueyong Wei, Yulong Zhao, Zhuangde Jiang, Yajing Shen
发表日期
2018/11/1
期刊
Sensors and Actuators A: Physical
卷号
283
页码范围
151-158
出版商
Elsevier
简介
According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications.
引用总数
20192020202120222023202471514191312
学术搜索中的文章
S Wang, X Wei, Y Zhao, Z Jiang, Y Shen - Sensors and Actuators A: Physical, 2018