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Several techniques for multivariate time series anomaly detection have been proposed recently, but a systematic comparison on a common set of datasets and metrics is lacking. This article presents a systematic and comprehensive evaluation of unsupervised and semisupervised deep-learning-based methods for anomaly detection and diagnosis on multivariate time series data from cyberphysical systems. Unlike previous works, we vary the model and post-processing of model errors, i.e., the scoring functions independently of each other, through a grid of ten models and four scoring functions, comparing these variants to state-of-the-art methods. In time-series anomaly detection, detecting anomalous events is more important than detecting individual anomalous time points. Through experiments, we find that the existing evaluation metrics either do not take events into account or cannot distinguish between a …