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Three dimensional printing (3D printing) or additive manufacturing is a promising approach for construction of small-sized, complex structures in microelectromechanical systems (MEMS). This paper reports the design, fabrication and testing of an XY nanopositioning flexure made up of Titanium alloy (Ti-6Al-4V) created for the first time through electron beam melting (EBM), also known as electron beam additive manufacturing (EBAM). Titanium alloys present attractive characteristics including high biocompatibility, distinct strength and corrosion resistance. However, it has been difficult to machine titanium alloys through conventional processes. The use of additive manufacturing has enabled us to build a multi-dimensional nanopositioning flexure with amplified mechanical displacement and improved bandwidth contained in a compact structure.

We first characterized mechanical properties of EBM-printed Ti-6Al-4V …