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In this paper, progress toward developing solid-state power-amplifier modules at 0.65 THz is reported. This work is enabled by a >;1 THz f _MAX InP HEMT transistor with a 30-nm gate and an integrated circuit process specifically tailored for circuits operating at frequencies approaching 1 THz. The building block of the reported amplifier modules is an eight-stage terahertz monolithic integrated circuit (TMIC) amplifier. The first six stages of the TMIC use 20- transistors, while the final two output stages rely on two power-combined 20-μm transistors to increase the output power. For operation at 0.65 THz, the TMIC also relies on integrated electromagnetic transitions for direct coupling with the WR1.5 waveguide of the amplifier package. Two modules are reported, with the first module containing a single TMIC and demonstrating a peak saturated output power of 1.7 mW at 640 GHz with a measured small-signal gain …