作者
Yu-Ze Chen, Henry Medina, Teng-Yu Su, Jian-Guang Li, Kai-Yuan Cheng, Po-Wen Chiu, Yu-Lun Chueh
发表日期
2015/4/28
期刊
ACS nano
卷号
9
期号
4
页码范围
4346-4353
出版商
American Chemical Society
简介
Recently, a few attempts to synthesize monolayers of transition metal dichalcogenides (TMDs) using the chemical vapor deposition (CVD) process had been demonstrated. However, the development of alternative processes to synthesize TMDs is an important step because of the time-consuming, required transfer and low thermal efficiency of the CVD process. Here, we demonstrate a method to achieve few-layers WSe2 on an insulator via laser irradiation assisted selenization (LIAS) process directly, for which the amorphous WO3 film undergoes a reduction process in the presence of selenium gaseous vapors to form WSe2, utilizing laser annealing as a heating source. Detailed growth parameters such as laser power and laser irradiation time were investigated. In addition, microstructures, optical and electrical properties were investigated. Furthermore, a patternable WSe2 concept was demonstrated by patterning …
引用总数
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