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In this paper, the local compositional and structural changes occurring in association with stacking faults in a Ni-base superalloy are characterized and related to the possible rate-controlling processes during creep deformation at intermediate temperatures. These rate-controlling processes are not presently understood. In order to promote stacking fault shearing, compression creep tests on specially prepared single crystals of an exploratory Ni-base superalloy were conducted at 760 °C in the [0 0 1] orientation. Scanning transmission electron microscopy (STEM) imaging was coupled with state-of-the-art energy dispersive X-ray (EDX) spectroscopy to reveal for the first time an ordered compositional variation along the extrinsic faults inside the γ′ precipitates, and a distinct solute atmosphere surrounding the leading partial dislocations. The local structure and chemistry at the extrinsic fault is consistent with the η …