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This paper describes the preparation and the characterization of zirconia-doped yttria (or calcia) produced by reactive thermal evaporation (RTE) and r.f. magnetron sputtering (R.F.MS) methods. The crystallographic, microstructural and optical properties of the deposited films were investigated as a function of dopant concentration in the ZrO₂ matrix. X-ray diffraction (XRD) analysis permits the study of the stabilization process, lattice parameter and residual stress. XRD patterns show a gradual change in the crystalline structure from a monoclinic phase to a single cubic phase with increasing Y₂O₃ (or CaO) mole percentage (mol%). The cubic lattice parameter seems to increase with increasing dopant mol%. A merely indicative stress study in stabilized samples shows tensile stress in the ZrO₂–Y₂O₃ system obtained by co-evaporation. Residual stresses were highly compressive in ZrO₂–Y₂O₃ (or CaO) systems …