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Efficient extraction of light from a high refractive index silicon waveguide out of a chip is difficult to achieve. An inverse design approach was employed using the particle swarm optimization method to attain a vertical emitting meta-grating coupler with high coupling efficiency in a 220-nm-thick silicon-on-insulator platform. By carefully selecting the figure of merit and appropriately defining parameter space, unique L-shape and U-shape grating elements that boosted the out-of-plane radiation of light were obtained. In addition, a 65.7% (−1.82  dB) outcoupling efficiency and a 60.2% (−2.2  dB) fiber-to-chip vertical coupling efficiency with an 88 nm 3 dB bandwidth were demonstrated by numerical simulation. Considering fabrication constraints, the optimized complex meta-grating coupler was modified to correspond to two etching steps and was then fabricated with a complementary metal-oxide-semiconductor …