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ZnS:Mn thin films were deposited on quartz, Si (polycrystalline), and glass substrates using a chemical bath deposition (CBD) method in an aqueous solution containing ethylene diamine tetra acetic acid disodium salt (Na₂EDTA) as the complexing agent for zinc ions and thioacetamide (TAA) as the sulfide source at temperatures ranging from 50 to 80 °C. ZnS:Mn thin films with thicknesses ranging from 60 to 450 nm were synthesized at various Mn²⁺/Zn²⁺ molar ratios ranging from 1 to 4. The effects of the process parameters on the properties of ZnS:Mn films were investigated. The films were characterized by energy-dispersive X-ray spectrometer (EDX), inductively coupled plasma atomic emission spectroscopy (ICP-AES), Rutherford backscattering (RBS), secondary ion mass spectrometry (SIMS), attenuated total reflection-Fourier transform infrared (ATR-FTIR) spectroscopy, X-ray photoelectron spectroscopy …