作者
Suraj Sharma, Niharika Kohli, Jonathan Brière, Frederic Nabki, Michaël Ménard
发表日期
2022/6/6
期刊
Optics Express
卷号
30
期号
12
页码范围
22200-22220
出版商
Optica Publishing Group
简介
We present a 1 × 3 optical switch based on a translational microelectromechanical system (MEMS) platform with integrated silicon nitride (SiN) photonic waveguides. The fabricated devices demonstrate efficient optical signal transmission between fixed and suspended movable waveguides. We report a minimum average insertion loss of 4.64 dB and a maximum average insertion loss of 5.83 dB in different switching positions over a wavelength range of 1530 nm to 1580 nm. The unique gap closing mechanism reduces the average insertion loss across two air gaps by a maximum of 7.89 dB. The optical switch was fabricated using a custom microfabrication process developed by AEPONYX Inc. This microfabrication process integrates SiN waveguides with silicon-on-insulator based MEMS devices with minimal stress related deformation of the MEMS platform.
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S Sharma, N Kohli, J Brière, F Nabki, M Ménard - Optics Express, 2022