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This paper presents the development and performance assessment procedures for a new XY parallel micropositioning platform (PMP) aiming at a submicrometer accuracy for microscale manipulation. The uniqueness of the proposed micro-parallel platform lies in that it possesses an uncomplicated structure as well as actuation isolation and output motion decoupling properties, which facilitates the adoption of two single-input-single-output controllers. Based on the matrix method, the kinetostatics models of the PMP are established and verified by finite-element analysis. Via system identification, a digital lag--lead compensator is designed to compensate for the hysteresis of each piezoelectric actuator. A feedforward control is then implemented to construct a zero phase error tracking controller. Positioning performance of the PMP in terms of resolution, accuracy, repeatability, and contouring performances of 1-D …