作者
Sourabh K Saha, James S Oakdale, Jefferson A Cuadra, Chuck Divin, Jianchao Ye, Jean-Baptiste Forien, Leonardus B Bayu Aji, Juergen Biener, William L Smith
发表日期
2017/12/7
期刊
ACS applied materials & interfaces
卷号
10
期号
1
页码范围
1164-1172
出版商
American Chemical Society
简介
Two-photon lithography (TPL) is a high-resolution additive manufacturing (AM) technique capable of producing arbitrarily complex three-dimensional (3D) microstructures with features 2–3 orders of magnitude finer than human hair. This process finds numerous applications as a direct route toward the fabrication of novel optical and mechanical metamaterials, miniaturized optics, microfluidics, biological scaffolds, and various other intricate 3D parts. As TPL matures, metrology and inspection become a crucial step in the manufacturing process to ensure that the geometric form of the end product meets design specifications. X-ray-based computed tomography (CT) is a nondestructive technique that can provide this inspection capability for the evaluation of complex internal 3D structure. However, polymeric photoresists commonly used for TPL, as well as other forms of stereolithography, poorly attenuate X-rays due to …
引用总数
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