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MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore, have been widely used in the fields of consumer electronics, industry, health, defence, and aerospace. With their ever-improving performance, MEMS sensors have also started to be used in resource exploration and geophysical applications. However, the requirements of high-precision MEMS sensors for geophysical applications have not been specified in detail. Therefore, this paper systematically analyzes the requirements of high-performance MEMS sensors for prospecting and geophysical applications, including seismic surveillance, Earth tide, volcanic activity monitoring for natural disasters; seismic, gravity, and magnetic resource prospecting; drilling process monitoring and local gravity measurement for gravity aided navigation. Focusing on the above applications, this paper summarizes the state-of-the-art of research …