作者
Wenxin Wang, Jun Ma, Zilong Cheng, Xiaocong Li, Clarence W de Silva, Tong Heng Lee
发表日期
2021/6/25
期刊
IEEE/ASME Transactions on Mechatronics
简介
This article proposes a global iterative sliding mode control approach for high-precision contouring tasks of a flexure-linked biaxial gantry system. For such high-precision contouring tasks, it is the typical situation that the involved multiaxis cooperation is one of the most challenging problems. As also would be inevitably encountered, various factors render the multiaxis cooperation rather difficult, such as the strong coupling (which naturally brings nonlinearity) between different axes due to its mechanical structure, the backlash and deadzone caused by the friction, and the difficulties in system identification. To overcome the abovementioned issues, this work investigates an intelligent model-free contouring control method for such a multiaxis motion stage. Essentially in the methodology developed here, it is first ensured that all the coupling, friction, nonlinearity, and disturbance (regarded as uncertain dynamics in …
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