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Detailed transmission electron microscopy examinations verified that α′-martensite formed in micron-sized pillars is nearly dislocation free, surprisingly different than its counterpart in bulk samples, which usually contains a high dislocation density. Furthermore, the martensite was found to nucleate at the intersection between two packets of stacking faults in this low stacking fault energy material. A corresponding mechanism for the nucleation and growth of martensite in micron-sized pillars was proposed.