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A low-cost monolithic accelerometer which incorporates a surface-micromachined polysilicon sensor with bipolar/MOS interface circuitry on a single chip has been developed for a measurement range of ± 5g. The accelerometer has a noise floor of 0.6 mg (Hz)^{1 2} and a shock survival rating of 1000g. A sensitivity temperature coefficient ± 50 ppm °C⁻¹ and an offset temperature coefficient of ±5 mg °C⁻¹ have been achieved over the −40 to +105 °C automotive temperature range. A wide bandwidth from d.c. to 4 kHz is adjustable using a single external capacitor. The accelerometer operates on a single 5 V power supply and consumes 40 mW of power. It provides an analog output of 200 mV g⁻¹ and a digitally activated self-test output of −5g.