作者
Ryan D Sochol, Eric Sweet, Casey C Glick, Sung-Yueh Wu, Chen Yang, Michael Restaino, Liwei Lin
发表日期
2018/4/5
来源
Microelectronic Engineering
卷号
189
页码范围
52-68
出版商
Elsevier
简介
Submillimeter-scale domains offer wide-ranging benefits for chemical and biological fields, which have motivated researchers to develop a diversity of strategies for manufacturing integrated microfluidic systems. Historically, microfluidic device construction has predominantly relied on micromachining technologies that are rooted in the semiconductor and microelectromechanical systems (MEMS) industries. These methodologies have enabled microfluidic platforms to be fabricated with fully integrated microelectronics – a critical requirement for applications such as electrophoresis and dielectrophoresis (DEP), surface acoustic wave (SAW) actuation, digital microfluidics (e.g., via electrowetting-on-dielectric (EWOD) phenomena), and on-chip electrochemical detection. Despite the distinguishing capabilities afforded by conventional microfabrication protocols, a number of inherent limitations have given rise to …
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