作者
Michael Hoffmann, Milan Pešić, Korok Chatterjee, Asif I Khan, Sayeef Salahuddin, Stefan Slesazeck, Uwe Schroeder, Thomas Mikolajick
发表日期
2016/12
期刊
Advanced Functional Materials
卷号
26
期号
47
页码范围
8643-8649
简介
To further reduce the power dissipation in nanoscale transistors, the fundamental limit posed by the Boltzmann distribution of electrons has to be overcome. Stabilization of negative capacitance in a ferroelectric gate insulator can be used to achieve this by boosting the transistor gate voltage. Up to now, negative capacitance is only directly observed in polymer and perovskite ferroelectrics, which are incompatible with semiconductor manufacturing. Recently discovered HfO2‐based ferroelectrics, on the other hand, are ideally suited for this application because of their high scalability and semiconductor process compatibility. Here, for the first time, a direct measurement of negative capacitance in polycrystalline HfO2‐based thin films is reported. Decreasing voltage with increasing charge transients are observed in 18 and 27 nm thin Gd:HfO2 capacitors in series with an external resistor. Furthermore, a multigrain …
引用总数
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M Hoffmann, M Pešić, K Chatterjee, AI Khan… - Advanced Functional Materials, 2016