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Ordered periodic microlattices with densities from 0.5 mg/cm 3 to 500 mg/cm 3 are fabricated by depositing various thin film materials (Au, Cu, Ni, SiO 2, poly (C 8 H 4 F 4)) onto sacrificial polymer lattice templates. Young's modulus and strength are measured in compression and the density scaling is determined. At low relative densities, recovery from compressive strains of 50% and higher is observed, independent of lattice material. An analytical model is shown to accurately predict the transition between recoverable “pseudo-superelastic” and irrecoverable plastic deformation for all constituent materials. These materials are of interest for energy storage applications, deployable structures, and for acoustic, shock, and vibration damping.