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The bowtie antenna is a topic of growing interest in recent years. In this letter, we design, fabricate, and characterize a modified gold bowtie antenna integrated on a transparent silica substrate. The bowtie antenna is designed with broad RF bandwidth to cover the X-band in the electromagnetic spectrum. We numerically investigate the antenna characteristics, specifically its resonant frequency and enhancement factor. Our designed bowtie antenna provides a strong broadband electric field enhancement in its feed gap. Taking advantage of the low-k silica substrate, high enhancement factor can be achieved without the unwanted reflection and scattering from the backside silicon handle, which is the issue of using a silicon-on-insulator (SOI) substrate. We simulate the dependence of resonance frequency on bowtie geometry, and verify the simulation results through experimental investigation, by fabricating different …