作者
Cheng Zhang, Harish Subbaraman, Qiaochu Li, Zeyu Pan, Jong G Ok, Tao Ling, Chi-Jui Chung, Xingyu Zhang, Xiaohui Lin, Ray T Chen, L Jay Guo
发表日期
2016
来源
Journal of Materials Chemistry C
卷号
4
期号
23
页码范围
5133-5153
出版商
Royal Society of Chemistry
简介
In order to manufacture large-scale photonic devices of various dimensions at a low cost, a number of patterning techniques have been developed. Nanoimprint lithography is among the most promising given its unique advantages, such as high resolution, fast processing speed, high throughput, compatibility with diverse materials, and low cost. This review covers various aspects of nanoimprint lithography, including its operational principles, material requirements, and different ways of implementation. Nanoimprint lithography facilitates numerous high-performance and low-cost photonic elements, including optical interconnects, sensors, solar cells, and metamaterials. In addition, other related patterning techniques, together with their utilization for photonic device fabrication and their integration with nanoimprint lithography, are briefly discussed.
引用总数
2016201720182019202020212022202320244127815168131
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C Zhang, H Subbaraman, Q Li, Z Pan, JG Ok, T Ling… - Journal of Materials Chemistry C, 2016