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We present gas sensing performance based on sensor array with four different elements (, , and thin films) fabricated by rf sputter. Each thin film was deposited onto the selected /Si substrate with Pt interdigitated electrodes (IDEs) of spacing which were fabricated on a /Si substrate using photolithography and dry etching. For 5 ppm and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.