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There has been a growing interest for micro-scale concentrator photovoltaics (micro-CPV) over the past few years. The main goal is to reduce the cell size to a sub-millimetric range to gain several benefits such as better handling, better thermal management and reduced series resistance losses. In this work, we present the microfabrication of micro-scale III-V/Ge triple junction solar cells with through cell via contacts (TCVC) for micro-CPV applications. This contact architecture transfers the front side contact to the back side by using isolated and metallized vias to reduce the shading and the resistive losses. A process was developed to fabricate 180x180 µm2 solar cells with a single through cell via contact. The first prototypes have been successfully fabricated and the electrical characterization shows good performance. A 1-sun open-circuit voltage of 2.28 V was obtained, which is high considering the small device …