作者
Amir H Atabaki, Sajjad Moazeni, Fabio Pavanello, Hayk Gevorgyan, Jelena Notaros, Luca Alloatti, Mark T Wade, Chen Sun, Seth A Kruger, Huaiyu Meng, Kenaish Al Qubaisi, Imbert Wang, Bohan Zhang, Anatol Khilo, Christopher V Baiocco, Miloš A Popović, Vladimir M Stojanović, Rajeev J Ram
发表日期
2018/4/19
期刊
Nature
卷号
556
期号
7701
页码范围
349-354
出版商
Nature Publishing Group UK
简介
Electronic and photonic technologies have transformed our lives—from computing and mobile devices, to information technology and the internet. Our future demands in these fields require innovation in each technology separately, but also depend on our ability to harness their complementary physics through integrated solutions,. This goal is hindered by the fact that most silicon nanotechnologies—which enable our processors, computer memory, communications chips and image sensors—rely on bulk silicon substrates, a cost-effective solution with an abundant supply chain, but with substantial limitations for the integration of photonic functions. Here we introduce photonics into bulk silicon complementary metal–oxide–semiconductor (CMOS) chips using a layer of polycrystalline silicon deposited on silicon oxide (glass) islands fabricated alongside transistors. We use this single deposited layer to realize optical …
引用总数
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