作者
Jason S Orcutt, Anatol Khilo, Charles W Holzwarth, Milos A Popović, Hanqing Li, Jie Sun, Thomas Bonifield, Randy Hollingsworth, Franz X Kärtner, Henry I Smith, Vladimir Stojanović, Rajeev J Ram
发表日期
2011/1/31
期刊
Optics express
卷号
19
期号
3
页码范围
2335-2346
出版商
Optica Publishing Group
简介
We demonstrate a monolithic photonic integration platform that leverages the existing state-of-the-art CMOS foundry infrastructure. In our approach, proven XeF_2 post-processing technology and compliance with electronic foundry process flows eliminate the need for specialized substrates or wafer bonding. This approach enables intimate integration of large numbers of nanophotonic devices alongside high-density, high-performance transistors at low initial and incremental cost. We demonstrate this platform by presenting grating-coupled, microring-resonator filter banks fabricated in an unmodified 28 nm bulk-CMOS process by sharing a mask set with standard electronic projects. The lithographic fidelity of this process enables the high-throughput fabrication of second-order, wavelength-division-multiplexing (WDM) filter banks that achieve low insertion loss without post-fabrication trimming.
引用总数
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JS Orcutt, A Khilo, CW Holzwarth, MA Popović, H Li… - Optics express, 2011