作者
Jason S Orcutt, Benjamin Moss, Chen Sun, Jonathan Leu, Michael Georgas, Jeffrey Shainline, Eugen Zgraggen, Hanqing Li, Jie Sun, Matthew Weaver, Stevan Urošević, Miloš Popović, Rajeev J Ram, Vladimir Stojanović
发表日期
2012/5/21
期刊
Optics express
卷号
20
期号
11
页码范围
12222-12232
出版商
Optica Publishing Group
简介
This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without degradation in transistor performance. We demonstrate an 8-channel optical microring-resonator filter bank and optical modulators, both controlled by integrated digital circuits. By developing a device design methodology that requires zero process infrastructure changes, a widely available platform for high-performance photonic-electronic integrated circuits is enabled.
引用总数
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