作者
Naveen Kumar, V Rajakumari, Ram Prasad Padhy, S Routray, KP Pradhan
发表日期
2024/3/4
期刊
Physica Scripta
卷号
99
期号
4
页码范围
046001
出版商
IOP Publishing
简介
In this article, the possibilities of accurate prediction of wide range of parameters and optimizing the same through machine learning (ML) approach have been demonstrated for the multi stacked nanosheet transistor (NSFET). The machine is trained by the generated data of the tedious calibrated technology computer aided (TCAD) simulations. An innovative strategy is employed that combines ML with device simulations. Numerous devices are simulated with different geometric parameters like height, width, length and equivalent oxide thickness of the channel. The input, output, and CV characteristics are extrapolated from the simulation which is predicted by ML models. The DC, Analog and RF parameters are derived with a domain expertise approach. The device parameters are anticipated with actual values by the ML approach. Random forest regression, linear regression, polynomial regression and decision …
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