作者
Risheng Cheng, John Wright, Huili G Xing, Debdeep Jena, Hong X Tang
发表日期
2020/9/28
期刊
Applied Physics Letters
卷号
117
期号
13
出版商
AIP Publishing
简介
Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the first use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs). Grown by molecular beam epitaxy (MBE) at high temperature on nearly lattice-matched AlN-on-sapphire substrates, the NbN films exhibit a high degree of uniformity and homogeneity. Even with relatively thick films, the fabricated nanowire detectors show saturated internal efficiency at near-IR wavelengths, demonstrating the potential of MBE-grown NbN for realizing large arrays of on-chip SNSPDs and their integration with AlN-based χ (2) quantum photonic circuits.
引用总数
2020202120222023202411211103
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