作者
G Vescio, J López-Vidrier, R Leghrib, A Cornet, A Cirera
发表日期
2016
期刊
Journal of Materials Chemistry C
卷号
4
期号
9
页码范围
1804-1812
出版商
Royal Society of Chemistry
简介
The soaring global demand for flexible, wearable and transparent devices has created an urgent need for new fabrication technologies that are both cost-competitive and eco-friendly. Printed electronics holds the promise of enabling low-cost, scalable solutions exploiting the ability of innovative materials to be used as processed inks onto a large area substrate. In this article, we demonstrate the direct drop-on-demand inkjet printing technology as a viable method for the fabrication of fully-printed metal–insulator–metal capacitors on a flexible substrate (Kapton®), where the high-k hafnium oxide (HfO2) was selected as the dielectric. After a low-temperature annealing process, the deposited nanoparticle (NP)-based ink of HfO2 showed high homogeneity and good integrity of the printed thin film by microscopy and spectroscopy studies. The fully-printed capacitors were characterized by field-emission scanning and …
引用总数
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G Vescio, J López-Vidrier, R Leghrib, A Cornet… - Journal of Materials Chemistry C, 2016