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Highly (100)-textured lead barium zirconate (PBZ) thin films of ∼0.1 μm and with a composition of were grown on electrode-coated Si by rf magnetron sputtering at 500 °C. The capacitor shows a hysteresis loop with remanent polarization, of 12 μC/cm² and coercive field of 185 kV/cm at an applied voltage of 10 V, along with a dielectric constant of 270. More importantly, it has a high fatigue resistance against polarization switching up to cycles.