作者
S Yoneoka, M Liger, G Yama, R Schuster, F Purkl, J Provine, FB Prinz, RT Howe, TW Kenny
发表日期
2011/1/23
研讨会论文
2011 IEEE 24th international conference on micro electro mechanical systems
页码范围
676-679
出版商
IEEE
简介
This paper presents an uncooled infrared bolometer using a metal thin film that is formed by atomic layer deposition (ALD). Nanometer-thick freestanding layers enabled by ALD have the potential to improve the performance of bolometers with achieving low thermal conductance and near optimal optical properties. The fabrication and characterization of the first implementation are described as well as the electrical properties of ALD platinum films.
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S Yoneoka, M Liger, G Yama, R Schuster, F Purkl… - 2011 IEEE 24th international conference on micro …, 2011