作者
Roozbeh Parsa, W Scott Lee, Mohammad Shavezipur, J Provine, Roya Maboudian, Subhasish Mitra, H-S Philip Wong, Roger T Howe
发表日期
2013/3/7
期刊
Journal of Microelectromechanical systems
卷号
22
期号
3
页码范围
768-778
出版商
IEEE
简介
Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room ambient conditions, the relays have a high contact resistance (> 1 GΩ) that requires high drain bias (3-5 V) to break through. The addition of a platinum sidewall coating reduces the on-resistance and the required drain bias to as low as 3 kΩ and 0.1 V, respectively. The platinum coating's stability is demonstrated by two tests: first, a contact-and-hold test where the relay passes current (~1μA) for up to 155 min and, second, a hot cycling test where the relay survives for over 10 8 cycles . The NEMS relays are simulated using finite-element analysis, and the models are verified against experimental tests. Furthermore, the relays are configured and tested as a 2 : 1 multiplexer to show their potential as a digital logic component.
引用总数
20132014201520162017201820192020202120222023202414114312765234
学术搜索中的文章
R Parsa, WS Lee, M Shavezipur, J Provine… - Journal of Microelectromechanical systems, 2013