作者
Maureen L Nietiadi, Luis Sandoval, Herbert M Urbassek, Wolfhard Möller
发表日期
2014/7/15
期刊
Physical Review B
卷号
90
期号
4
页码范围
045417
出版商
American Physical Society
简介
Spherical objects, such as clusters, nanoparticles, or aerosol particles, are sputtered when exposed to energetic irradiation. We use Monte Carlo (MC) and molecular dynamics (MD) computer simulation to study this process, with 20 keV Ar impact on a-Si clusters as a prototypical example. The sputter yield is quantified as being influenced by oblique incidence and target curvature. Cluster radii are scaled to the energy deposition depth, . For large sphere sputtering follows closely the sputtering of planar targets, if the variation of the incidence angle on the sphere surface is taken into account. For smaller radii, the yield increases due to the influence of curvature. For radii pronounced forward sputtering leads to a maximum in the sputter yield. For smaller , sputter emission becomes isotropic, but decreases in magnitude since not all the projectile energy is deposited in the sphere. However, for all …
引用总数
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学术搜索中的文章
ML Nietiadi, L Sandoval, HM Urbassek, W Möller - Physical Review B, 2014