作者
Lukas Chrostowski, Hossam Shoman, Mustafa Hammood, Han Yun, Jaspreet Jhoja, Enxiao Luan, Stephen Lin, Ajay Mistry, Donald Witt, Nicolas AF Jaeger, Sudip Shekhar, Hasitha Jayatilleka, Philippe Jean, B Simon, Jonathan Cauchon, Wei Shi, Cameron Horvath, Jocelyn N Westwood-Bachman, Kevin Setzer, Mirwais Aktary, N Shane Patrick, Richard J Bojko, Amin Khavasi, Xu Wang, Thomas Ferreira de Lima, Alexander N Tait, Paul R Prucnal, David E Hagan, Doris Stevanovic, Andy P Knights
发表日期
2019/5/20
期刊
IEEE Journal of Selected Topics in Quantum Electronics
卷号
25
期号
5
页码范围
1-26
出版商
IEEE
简介
A successful design, fabrication and test of silicon photonic circuits requires design tools, process design kits (PDKs), foundries for fabrication, and test facilities. This paper describes the complete design flow of photonic circuits using rapid-prototyping multiproject wafer foundry processes available in the SiEPIC program. The focus of this paper is on rapid prototyping based on electron beam lithography as an alternative and complementary to what is available via deep-UV lithography-based foundries. We describe in detail the PDK and the use of open-source and commercial tools for the design of optical filters, sensors, neuromorphic photonic processors, optical switches, and discuss test and packaging approaches for these designs. We demonstrate that a “germanium less” process can be used to build small systems featuring photoconductive detectors, electronics, and phase shifters.
引用总数
2019202020212022202320248202518147
学术搜索中的文章
L Chrostowski, H Shoman, M Hammood, H Yun… - IEEE Journal of Selected Topics in Quantum …, 2019