作者
Jacopo Iannacci
发表日期
2018/8/15
期刊
Sensors and Actuators A: Physical
卷号
279
页码范围
624-629
出版商
Elsevier
简介
Microsystems for Radio Frequency (RF) passive elements, known as RF-MEMS, have been attracting the attention of academic and industrial research since their first discussion, thanks to the remarkable performance they can trigger. Despite the flattering premises, RF-MEMS technology did not score consistent spread into mass-market applications, yet, as technical issues still needed to be managed, but also because consumer products did not use to really need such pronounced characteristics. Nowadays, the application scenarios of 5G (i.e. 5th generation of mobile communications and networks) and of the Internet of Things (IoT), highlight a growing need for cutting edge performance that RF-MEMS are capable of addressing. Given such a context, this short communication discusses an RF-MEMS series ohmic micro-switch, electrostatically driven and fabricated in a surface micromachining process, exhibiting …
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