作者
Flavio Giacomozzi, Viviana Mulloni, Sabrina Colpo, Jacopo Iannacci, Benno Margesin, Alessandro Faes
发表日期
2011/10/17
研讨会论文
CAS 2011 Proceedings (2011 International Semiconductor Conference)
卷号
1
页码范围
155-158
出版商
IEEE
简介
The paper reports about the technology platform for the fabrication of RF-MEMS devices developed at FBK. The most important process features, requirements and possible applications are presented and described. The basic fabrication process, together with some of the more important process variations and its capabilities are reported. Finally, some examples of produced devices and their performances are briefly presented.
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F Giacomozzi, V Mulloni, S Colpo, J Iannacci… - CAS 2011 Proceedings (2011 International …, 2011