作者
MM Hossain, KC Paul, Y Tanaka, T Sakuta, T Ishigaki
发表日期
2000/8/7
期刊
Journal of Physics D: Applied Physics
卷号
33
期号
15
页码范围
1843
出版商
IOP Publishing
简介
A pulse-modulated rf inductively coupled thermal plasma, which has extended control in its applications in pulse mode, was diagnosed both experimentally and numerically to determine the critical values of the duty factor and shimmer current level down to which the pulse mode of the plasma is sustained. Pulse-modulated plasmas were generated for different operating conditions (at atmospheric pressure, 2-20 ms on-time, 60-70% shimmer current level) and corresponding spectroscopic measurements were carried out. For different pulse on-times, the limit of the respective off-times for which pulse mode of plasma exists were determined and, thus, a typical operating zone of pulse-modulated plasma was proposed in both experimental and theoretical efforts. A two-dimensional model was solved numerically at atmospheric pressure (760 Torr) with various duty factors and shimmer current levels. A portion of …
引用总数
2002200320042005200620072008200920102011201242111
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MM Hossain, KC Paul, Y Tanaka, T Sakuta, T Ishigaki - Journal of Physics D: Applied Physics, 2000