作者
MM Hossain, Y Tanaka, T Sakuta
发表日期
2003/7/1
期刊
Thin Solid Films
卷号
435
期号
1-2
页码范围
19-26
出版商
Elsevier
简介
Solving a two-dimensional LTE (Local Thermodynamic Equilibrium) code, simulation of Ar–CO2 and Ar–N2 PMITP (Pulse Modulated Induction Thermal Plasma) has been carried out. The active plasma power, fundamental frequency and gas flow rate are 27 kW, 0.45 MHz and 100/102.5 slpm, respectively. It has been found that the injection of excess dissociative molecular gases, shrinks the plasma and slows down the plasma response at the instant of off-to-on-pulsing transition, which results mainly from the molecular dissociation and ionization. Plasma response has been found faster at higher SCL (Shimmer Current Level) for the same duty factor during the on pulsing transition, and hardly affected by SCL and molecular gas addition during off pulsing transition. Pressure does not appreciably affect the response of Ar–CO2 plasma, whereas response of Ar–N2 plasma becomes a bit faster at increased pressure …
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