作者
T Sakuta, Y Tanaka, KC Paul, MM Hossain, T Ishigaki
发表日期
2000
期刊
TRANSACTIONS-MATERIALS RESEARCH SOCIETY OF JAPAN
卷号
25
期号
1
页码范围
35-38
出版商
MATERIALS RESEARCH SOCIETY OF JAPAN
简介
An induction thermal plasma system has been newly designed for advanced operation with a pulse modulated mode to control the plasma power in time domain and to create non-equilibrium effects such as fast quenching of the plasma to produce new functional materials in a high rate. The system consists of MOSFET power supply with a maximum power of 50 kW with a frequency of 450kHz, an induction plasma torch and a vacuum chamber. The pulse modulated plasma was successfully produced at a plasma power of 30 kW and a pressure of 760 torr, with taking the on and off time as 10 and 5 ms, respectively. Measurements were carried out on the time variation of the spectral lines emitted from Ar species. The plasma temperature in an on-off cycle was estimated by the Boltzmann plot method and it changed periodically from 0.5 to 2.5 e V during the cycle as well as deviated considerably from the estimation of thermal equilibrium calculation.
引用总数
2000200120022003200420052006200720082009201020112012201311321
学术搜索中的文章
T Sakuta, Y Tanaka, KC Paul, MM Hossain, T Ishigaki - TRANSACTIONS-MATERIALS RESEARCH SOCIETY …, 2000