作者
KC Paul, MM Hossain, Y Hashimoto, Yasunori Tanaka, Tadahiro Sakuta
发表日期
2001/4
期刊
IEEE transactions on plasma science
卷号
29
期号
2
页码范围
326-334
出版商
IEEE
简介
Radio-frequency inductively coupled plasma in a pulse modulated approach was generated by a MOSFET inverter supply of high electric efficiency. The plasma torch has an extremely long coil region of 153 mm, which is an attractive feature for advanced materials processing, especially for better and more efficient vaporizing of solids. The operating conditions were: argon flow of 80 or 90 L/m at atmospheric pressure; supply power of 30 kW; and pulse on-time of 10 ms at 67% duty factor. Spectroscopic measurements were carried out to determine the temporal plasma properties, including the effects of shimmer current level (SCL) upon the spectral intensities. Additionally a time-dependent two-dimensional numerical model was solved for the same operating conditions employed in the experiment to predict and compare the plasma properties. Pulsed plasma dissipation sustained for a minimum SCL of 43% for 80 L …
学术搜索中的文章
KC Paul, MM Hossain, Y Hashimoto, Y Tanaka… - IEEE transactions on plasma science, 2001