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This paper reports the fabrication method and humidity sensing performances of zinc oxide nanorods (ZONRs) and chitosan self-assembled monolayers (SAMs) modified ZONRs patterned piezoresistive silicon MEMS microcantilevers. The self-actuating and self-sensing microcantilevers were fabricated using standard silicon wafers and bulk-micromachining techniques; a p-diffused heating resistor was patterned at the clamped end of the microcantilever as the self-actuator. Moreover, the resonant frequency shift induced by the mass change of adsorbed water on the hybrid sensing nanostructure can be read-out directly by a p-diffused full Wheatstone bridge. Aligned high-surface-to-volume-ratio ZONRs were selectively deposited on the microcantilever as the sensing material using a simple low-temperature chemical-bath deposition (CBD) process based on a DC sputtering/annealing ZnO seed-layer. In addition …