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Metal–insulator–metal (MIM) devices based on titanium dioxide thin films exhibit resistive switching behavior (RS); i.e., they have the ability to switch the electrical resistance between high-resistive states (HRS) and low-resistive states (LRS) by application of an appropriate voltage. This behavior makes titanium dioxide thin films extremely valuable for memory applications. The physical mechanism behind RS remains a controversial subject but it has been suggested that it could be interface-type, without accompanying structural changes of the oxide, or filament-type with formation of reduced titanium oxide phases in the film. In this work, X-ray absorption spectroscopy (XAS) at the Ti K-edge (4966 eV) was used to characterize the atomic-scale structure of a nonstoichiometric TiO_2–x thin film before and after annealing and for the first time after inclusion in a MIM device based on a Cr/Pt/TiO_2–x/Pt stack developed on …