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This paper presents the first 62 GHz fully onchip RF-DC rectifier in 65nm CMOS technology. The rectifier is the bottleneck in realizing on-chip wireless power receivers. In this paper, efficiency problems of the mm-wave rectifier are discussed and the inductor-peaked rectifier structure is proposed and realized. By using an inductor-peaked diode connected transistor, self-threshold voltage modulation, and an output filter, the measured rectifier reaches 7% efficiency with 1 mA current load. Compared to previous state-of-art 45 GHz rectifier with 1.2% efficiency [1], our solution achieves a higher efficiency at a higher frequency, providing a better solution for mm-wave wireless power receivers.