作者
Keith Powell, Liwei Li, Amirhassan Shams-Ansari, Jianfu Wang, Debin Meng, Neil Sinclair, Jiangdong Deng, Marko Lončar, Xiaoke Yi
发表日期
2022/4/5
期刊
Nature Communications
卷号
13
期号
1
页码范围
1851
出版商
Nature Publishing Group UK
简介
Owing to its attractive optical and electronic properties, silicon carbide is an emerging platform for integrated photonics. However an integral component of the platform is missing—an electro-optic modulator, a device which encodes electrical signals onto light. As a non-centrosymmetric crystal, silicon carbide exhibits the Pockels effect, yet a modulator has not been realized since the discovery of this effect more than three decades ago. Here we design, fabricate, and demonstrate a Pockels modulator in silicon carbide. Specifically, we realize a waveguide-integrated, small form-factor, gigahertz-bandwidth modulator that operates using complementary metal-oxide-semiconductor (CMOS)-level voltages on a thin film of silicon carbide on insulator. Our device is fabricated using a CMOS foundry compatible fabrication process and features no signal degradation, no presence of photorefractive effects, and stable …
引用总数
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K Powell, L Li, A Shams-Ansari, J Wang, D Meng… - Nature Communications, 2022