作者
Maxime Darnon, Gilles Cunge, Nicholas St J Braithwaite
发表日期
2014/2/28
期刊
Plasma Sources Science and Technology
卷号
23
期号
2
页码范围
025002
出版商
IOP Publishing
简介
The resurgence of industrial interest in pulsed radiofrequency plasmas for etching applications highlights the fact that these plasmas are much less well characterized than their continuous wave counterparts. A capacitively coupled planar probe is used to determine the time variations of the ion flux, electron temperature (of the high-energy tail of the electron energy distribution function) and plasma density. For a pulsing frequency of 1 kHz or higher, the plasma never reaches a steady state during the on-time and is not fully extinguished during the off-time. The drop of plasma density during the off-time leads to an overshoot in the electron temperature at the beginning of each pulse, particularly at low frequencies, in good agreement with modeling results from the literature.
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