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Phase change materials combined with silicon photonics are emerging as a promising platform to realize miniature photonic devices. We study the basic optical properties of a subwavelength-dimension silicon ridge waveguide with a 20-nm-thick Ge2Sb2Te5 (GST) top-clad layer. Numerical simulations show that the effective index of the Si-GST hybrid waveguide varies significantly when the GST changes from the amorphous to the crystalline states. This change can be utilized to make micron-size photonic devices. To experimentally verify the effectiveness of the Si-GST hybrid waveguide on light wave manipulation, we fabricated a series of unbalanced Mach-Zehnder interferometers with one arm connected with a section of Si-GST hybrid waveguide in different lengths. The transmission spectra are measured and the complex effective indices are extracted for GST at crystalline, amorphous, and intermediate …