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Scanning probe microscopy (SPM; also known as atomic force microscopy (AFM) is considered a spin-off of Scan ning tunneling microscopy (STM). An SPM system mea Sures the topography of a sample by Scanning (sliding) a probe having a Small tip over the sample's Surface and monitoring the tip position in the Z-direction at each point along the scan path. Alternatively the SPM probe can be used as a nano-Spreading Resistance Probe (nano-SRP), used for the determination of the resistance and carrier profile of a Semiconductor element, or for nano potentiometry measurements of the electrical potential dis tribution on a Semiconductor element.