查看文章

Appl. No.: 10/112,215(57) 1-1. Scanning probe Systems, which include Scanning probe (22) Filed: Mar. 29, 2002 microscopes (SPMs), atomic force microscope (AFMs), or (65) Prior Publication Data profilometers, are disclosed that use cantilevered Spring (eg, stressy metal) probes formed on transparent Substrates. US 2003/0182993 A1 Oct. 2, 2003 When released, a free end bends away from the substrate to (51) Int. Cl." G01B 9/00 form the cantilevered Spring probe, which has an in-plane or

-------------------------------------------------- out-of-plane tip at its free end. The Spring probe is mounted