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Arterial pulse waves contain a wealth of parameters indicative of cardiovascular disease. As such, monitoring them continuously and unobtrusively can provide health professionals with a steady stream of cardiovascular health indices, allowing for the development of efficient, individualized treatments and early cardiovascular disease diagnosis solutions. Blood pulsations in superficial arteries cause skin surface deformations, typically undetectable to the human eye; therefore, Microelectromechanical systems (MEMS) can be used to measure these deformations and thus create unobtrusive pulse wave monitoring devices. Miniaturized ultrathin and flexible Aluminium Nitride (AlN) piezoelectric MEMS are highly sensitive to minute mechanical deformations, making them suitable for detecting the skin deformations caused by cardiac events and consequently providing multiple biomarkers useful for monitoring …