作者
E Skotadis, JL Tanner, S Stathopoulos, V Tsouti, D Tsoukalas
发表日期
2012/12/1
期刊
Sensors and Actuators B: Chemical
卷号
175
页码范围
85-91
出版商
Elsevier
简介
Chemical gas sensors have been fabricated from platinum and poly(2-hydroxyethylmethacrylate) (PHEMA) polymer. Sputtered platinum nanoparticles have been deposited on flat silicon substrates and a second layer of PHEMA polymer has been deposited on top using ink-jet printing. Density of the platinum nanoparticles and resistance of the device, which can both be tuned by controlling the deposition time, directly affect the response of the sensors as measured in the presence of ethanol and humidity. Chemi-resistive and chemi-capacitive sensors capable of detecting low gas concentrations (1000ppm of humidity and 500ppm of ethanol) have been made possible.
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E Skotadis, JL Tanner, S Stathopoulos, V Tsouti… - Sensors and Actuators B: Chemical, 2012